中文摘要：

为给新型高速超精数控和微纳制造等装备的精密运动台的设计研制提供理论指导,解决高速高精运动平台的控制问题,首先建立了精密工作台伺服系统测量模型;根据此类系统重复步进与扫描运动的特点,进而研究了具有解耦的周期性干扰补偿器的离散滑模变结构控制技术,有效地解决了精密伺服系统在大范围运动引起的控制模型不确定性和各种干扰带来的性能损失问题。并运用Matlab软件进行了仿真,仿真结果表明与常用的PID控制加陷波滤波器相比,基于周期性干扰解耦的补偿的离散变结构滑模控制性能优于传统的控制结构,不但可以有效地提高系统的响应速度,减小跟踪误差,设计更简单,易于在线调试,使系统具有更满意的控制效果。

英文摘要：

In order to provide theoretical support for the high-speed and high-precision stages of micro-electronic equipments,such as stepping and scanning lithography tools and inter-connecting machines,the dynamics model of the positioning system for the servo stages is established.Based on the character of the system,the discrete-time sliding mode control with decoupled periodic disturbance compensation for the servo system is presented,Simulation using Matlab software shows that,the proposed controller can effect...