中文摘要：

光学材料的亚表面损伤层（ SSD ）是激光光学领域内的研究热点之一。亚表面损伤层的存在将导致其表面薄膜特性发生变化，尤其是在高精度低损耗激光薄膜的设计与制造中亚表面损伤层必须给予考虑。文中研究了亚表面损伤层的物理特性，并借助于椭圆偏振仪测量基底表面的椭偏光谱，反演计算出SSD的物理厚度和折射率梯度。通过计算得到了亚表面的深度和梯度对激光减反膜反射率光谱的影响，证明了亚表面深度对反射率的影响具有周期效应。在考虑亚表面损伤层的深度和梯度存在的基础上，对激光减反膜的设计进行了理论修正，数值实验结果证明通过膜系的修正可以实现633 nm处的零反射。

英文摘要：

Subsurface damage （SSD） of optical material is a focal point of research in laser optical field. The existence of SSD of substrates would change the properties of thin film, and the influence of the surface damage in substrates is essential to ansider during the design, manufacture of high precision low loss laser antireflection coating. Physical properties of SSD were studied. And the physical thickness and refractive index gradient of SSD could be retrieved by the spectroscopic ellipsometry of substrate surface. Then the effect of them on reflection spectrum of antireflection coating was obtained by calculation. The depth of SSD affects the reflection spectrum periodically. At last, with depth and gradient of SSD taken into account, the design of laser antireflection coating was revised theoretically, and the numerical experiment shows that the design is possible to realize zero-reflection at 633 nm.