提出了两种新型单片电容传感器结构,用ANSYS软件对不同参数的传感器进行了仿真,分析了被测物距离、电极间隙和电极厚度对传感器初始电容和灵敏度的影响,并通过实验对仿真结果进行了验证。结果表明,测量系统的灵敏度与电极间隙和被测物距离近似成反比,传感器初始电容值随电极结构复杂度提高而增大;电极厚度对电容值的影响非单调,存在最优值。
The mathematic model of two capacitance sensors with complex electrode is put forward and simulated using finite element method. ANSYS numerical analysis and experiment results indicate that the sensitivity of the sensor is in inverse proportion to the gap of electrodes and the distance from the object being measured. The measured initial capacitance increases as the complexity of the electrodes increases. And the influence of the electrode thickness on capacitance is not monotonous and the electrode thickness has an optimal value. This research results can be used as guidance for the structure parameter optimization of capacitive sensor.