中文摘要：

采用溶胶凝胶法在不锈钢基片上沉积N iO薄膜。考察溶胶粘度对薄膜形貌的影响,并利用热重-差热分析、扫描电子显微镜、X射线衍射等对前驱体热分解行为、薄膜形貌和结构进行了表征。结果表明：直接以聚丙烯酸（PAA）为螯合剂,醋酸镍为镍源,去离子水为溶剂合成了均匀稳定的溶胶,随着溶胶粘度的降低获得的N iO薄膜表面更加光滑致密;在烧结过程中,干凝胶前驱体于450℃已经基本完全分解并逐渐形成晶体N iO;随烧结温度升高,N iO薄膜表面颗粒大小增加,结构更加完善;经500℃烧结2 h时获得了结晶度高,结构致密的N iO薄膜,有望成为高性能薄膜锂离子电池的阳极材料。

英文摘要：

NiO thin film on stainless substrate was prepared by sol-gel process.The effects of sol viscosity on NiO thin film surface morphology and the thermal decomposition behavior of dry gel precursor and its morphology and structure were examined by TG-DSC,XRD and SEM.The results show that a uniform and steady sol is obtained by directly polyacrylic acid（PAA）as a chelating agent with nickel acetate as a nickel source.The NiO thin film becomes smooth and dense with the decreasing of sol viscosity.The dry gel precursor entirely decomposes at 450 ℃ and gradually forms the crystal structure NiO during the sintering.With the increasing of sintering temperature,the NiO film surface particle size increases and the structure tends to perfect.The NiO thin film sintered at 500 ℃ for 2 h exhibits perfect crystal structure and compactness,promising as high performance anode material for lithium ion battery.