The influence of surface pre-treatments, shot-peening (SP) and laser remelting (LR), on oxygen permeation behaviors of titanium alloy TC11 was investigated. Optical microscope, SEM with EDAX, XRD, and microhardness tester were employed to characterize the microstructure, composition and hardness of this alloy. The results show that the surface roughness is increased by shot-peening, and the microstructure with fine-grain can be obtained by LR pre-treatment. The pre-treated samples were oxygen-permeated at (810± 10) ℃ for 10 h in atmospheric air. The outer layer consists essentially of TiO2, trace Ti2 N, Ti3Al and Ti3AlN for the SP pre-treatment and thin oxygen solution layer is found in the subsurface layer. As for LR pre-treatment, the outer layer consists mainly of TiO2 and small amounts of TiO, and the inner layer consists of alpha crystals, rich in interstitial atoms. Samples by LR pre-treatment has thicker hardened layer with higher hardness values in comparison with SP pre-treated ones.The boost diffusion of oxygen and hardening mechanisms were discussed based on the experimental results.