中文摘要：

微细刀具的制造方法是保证微细铣刀制造精度的技术关键。从砂轮与工件的相对运动关系出发,依据砂轮与工件的啮合条件,分析砂轮表面法矢量在母线交点处的变化情况,建立砂轮与螺旋沟槽完整公共接触线方程,由接触线围绕工件轴线回转形成回转面的轴向截形,推导出铣刀轴向截形的廓形方程,同时根据廓形方程仿真出沟槽截形,据此分析了安装参数对截形的误差敏感度。在刃磨微细铣刀螺旋沟槽过程时,提出采用Z轴插补对挠曲进行补偿的方法,通过计算刃磨过程的挠曲变形量,相应地在工件的轴向位置补偿变形量。实验表明,补偿后实得微细铣刀的前角和芯厚与仿真的铣刀螺旋槽几何参数吻合良好。

英文摘要：

Micro tool manufacturing technology is the key for guaranteeing the manufacturing accuracy of micro milling cutter. According to the relative motion relationship and the meshing condition between the grinding wheel and the workpiece,the changes of normal vector of the intersection point for the grinding wheel generatrix was analyzed, and the equation of common contact line was established. Further, using the rotating cross-sectional shape formed by the rotation of contact line around the workpiece axis, the profile equation of the axial cross-sectional shape of the milling tool was deduced. During the process, a method of compensate deflection at Z axis is proposed, through the calculation of bending deformation of the workpiece in grinding process. Experiments show that rake angle and core thickness of micro milling cutter obtained after the compensation, are good agreement with the simulation shape of the helical groove.