中文摘要：

提出一种新型大行程磁悬浮直线精密运动平台,为了解其各种工况下的固有频率和振型,从而指导磁浮平台的结构设计及控制器设计,运用有限元软件建立其三维有限元模型,对磁浮平台各部件及整个平台处于不同工况、不同状态下的模态进行深入探讨,揭示磁浮平台在各种工况下模态的变化规律.结果表明,平台薄弱部分或可能影响运行精度的区域在电磁铁支撑上,平台处于悬浮时刚度最低,悬浮体的运动位置对平台整体模态基本无影响,电磁铁支撑刚度需要控制在合理范围内.分析结果为结构优化提供了重要参考.

英文摘要：

A novel precise maglev platform with long travel range was presented in order to get more information about the natural frequencies and the corresponding vibration modes of the proposal platform under various conditions,and conduct the structural design for the platform.Its 3D finite element model was built.And the modal analyses for the components of the platform,the whole machine under different positions,and the whole machine with different electromagnet stiffness after steady suspension were carried out with finite element method.The modal simulation results showed that the weak point of the motion platform or the possible regions which affects the work accuracy was located at the lower electromagnet.The stiffness of the platform is the smallest when it is suspended.The position of the moving object has few interactions with the modal of the overall platform.The equivalent stiffness of the electromagnet is supposed to be limited to a reasonable range to increase the platform stiffness.These results provide an important reference for the structural optimization.