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中文摘要：
利用自主合成的非线性有机-无机复合材料作为包层，紫外光敏型SU-8负胶为芯层，通过直接光写入技术成功研制了双有源包层结构聚合物41×41信道阵列波导光栅（AWG）器件。器件在设计中采用正矩形的波导结构。经计算，当包层厚度为5μm，芯径尺寸为4μm×4μm时，可实现单模传输。器件波长间隔定为0．8nm，中心波长为1550nm。经测试，该器件传输损耗为1．2dB／cm，中心信道衍射损耗为6．2dB，实测波长间隔为0．793nm，器件的温度漂移量为-0．08nm／℃。
英文摘要：
A compact 41× 41 arrayed waveguide grating （AWG） device with double active layers is fabricated by using SU-8 minus negative core whose type is ultraviolet （UV） light-sensitive type and organic-inorganic hybrid material cladding. A rectangular waveguide structure is selected in the calculation of AWG and the single mode can be achieved with cladding thickness of 5 μm and the core cross sectional area of 4μm × 4μm. For the AWG device, the channel space is set as 0.8 nm with the central wavelength of 1550 nm. After testing, the transmission loss is 1.2 dB/cm, the diffraction loss of the central channel is 6. 2 dB, the tested channel space is 0. 793 nm and the central wavelength shift is -0.08 nm/℃ .
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