中文摘要：

在交流电渗流（ACEO）泵的研究中,一般忽略电极厚度的影响;而三维交流电渗流泵通过将电极厚度设计成台阶形式后,可以大大提高电渗流泵的流量。数值研究了电极台阶高度对三维交流电渗流泵流量的影响。研究发现：在驱动电压幅值不变的条件下,随着台阶高度的增加,三维交流电渗流泵流量也会增大;而当台阶高度增加到一定程度后,流量又会随着台阶高度的增加而减小。因此,在三维交流电渗流泵的设计制造中,需要优化电极的台阶高度,选择合适的台阶高度可以极大地提高电渗流泵的流量。通过和传统交流电渗流泵的比较,还研究了三维交流电渗流泵对流量的增强效果。结果表明：在相同模型尺寸参数下,优化台阶高度后的三维交流电渗流泵能极大提高流量。

英文摘要：

In the study of AC electroosmotic（ACEO）pumps,the influence of electrode thickness is ignored generally.While introducing nonplanar geometries with raised steps on the electrodes,three-dimensional（3D）AC electroosmotic pumps can achieve faster flows.The effect of the step height on the flows of 3D AC electroosmotic pumps was numerically analyzed.The numerical simulations predict that the flows of 3D AC electroosmotic pumps increase with increasing step height at a given voltage.When the step height is up to a certain degree,the flows decrease with the step height increases.Therefore,it is need to optimize the height of steps in the design of 3D AC electroosmotic pumps.Selecting the appropriate height of steps can greatly improve the flows of the electroosmotic pumps.Compared with the traditional AC electroosmotic pumps,the enhancement effects on the flows of 3D AC electroosmotic pumps was researched.The results show that 3D AC electroosmotic pumps can greatly increase flows in the same model size parameters after optimizing the height of steps.