中文摘要：

为了实现微波等离子推力器的小型化，利用固态器件、衰减器和检波器一体化设计技术及液体冷却技术，研制出小型化的微波等离子推力器固态源，其输出和反射微波功率可由固态源输入电压和检波器的输出电压进行控制与检测，固态源的质量与体积分别是磁控管微波源的15％和6％。对采用固态源的推力器分别进行了地面和真空实验，结果表明固态源能稳定可靠地工作。

英文摘要：

In order to realize miniaturization of the microwave plasma thruster（ MPT）, the solid source of the miniaturized MPT was developed by means of the integrated design technology of solid apparatus, attenuator and detector as well as the liquid cooling technology. Its output and reflected microwave power can be controlled and tested by the input voltage of the solid source and the output voltage of the detector. Its weight and volume are 15 and 6 percent of microwave source with magnetron respectively. The ground test and the vacuum test of MPT indicate that the solid state microwave source is reliable and stable.