中文摘要：

集中应力和耦合位移是影响基于柔性铰链和压电陶瓷驱动器的微操作器性能的关键因素。单平行四杆机构具有低的集中应力，但存在大的耦合位移，双平行四杆机构没有耦合位移但存在较大的集中应力。在分析上述2种经典微操作器机构优缺点的基础上，吸取每一种机构的优点，摈弃各自的缺点，构建了一种复合四杆机构，并对这3种机构进行了对比分析，用有限元仿真的结果证明了理论分析的正确性。本文还设计加工了3种类型的二维微操作器柔性铰链机构与压电陶瓷驱动组成二微维操作器，并进行了对比实验研究，实验结果表明，该复合四杆微操作器性能优于经典的平行四杆微操作器和双平行四杆微操作器。

英文摘要：

Concentrated stress and parasite displacement are two key factors that influence the performance of micromanipulator based on flexure hinge and piezoelectric actuator. The merits and demerits of four-bar parallel micromanipulator and double four-bar parallel mieromanipulator were analyzed. Taking their merits and eliminating their demerits, a compound four-bar parallel micromanipulator was proposed. Theoretical analysis and finite element simulation prove that the proposed micromanipulator features a little concentrated stress and no parasitic error. Based on above discussion three kinds of two-dimension micromanipulators were designed and manufactured, their performances were studied in experiments. Comparison experiment results show that the proposed compound four-bar two-dimension mieromanipulator has the best performance.