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Minimum entropy based run-to-run control for semiconductor processes with uncertain metrology delay
  • ISSN号：0959-1524
  • 期刊名称：Journal of Process Control
  • 时间：0
  • 页码：1688-1697
  • 语言：英文
  • 相关项目：基于随机分布控制理论的网络控制系统研究
作者： Chen, Junghui|Munoz, Jose|Zhang, Jianhua|Chu, Chih-Chiang|
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基于随机分布控制理论的网络控制系统研究
期刊论文 9 会议论文 17
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