中文摘要：

运用有限元方法对原子力显微镜的悬臂在超声激励下的振动行为进行数值计算,对实验结果进行预估,并将计算结果与超声原子力显微镜实验方法获得的谐振频谱进行对比,仿真结果与实验结果吻合,验证了仿真方法的可靠性.同时,分析了悬臂上探针的位置对谐振频率的影响.结果表明：悬臂梁振动的谐振频率随着接触刚度的增大（减小）而增大（减小）,随着探针位置与悬臂固定端的距离的增大（减小）而减小（增大）.

英文摘要：

The elastic modulus of material in micro-regions could be achieved by the non-destructive testing method at the nanoscale based on ultrasonic atomic force microscopy techniques. The vibration behavior of the micro-beam excited by ultrasonic wave was calculated numerically by the finite element method. The results calculated were compared with the resonance spectra gotten by the ultrasonic atomic force microscopy method experimentally. The simulation results coincide with the experimental results,by which the reliability of the simulation method was verified. The effects of the position of the sense tip on the resonant frequency were also described.