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Study on reactive sputtering of yttrium oxide: Process and thin film properties
  • ISSN号：0257-8972
  • 期刊名称：Surface and Coatings Technology
  • 时间：2015.8.25
  • 页码：39-46
  • 相关项目：碳素材料与超硬材料
作者： Jiaqi Zhu|Xiaoting Chen|Jiecai Han|Diederik Depla|
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碳素材料与超硬材料
期刊论文 46 会议论文 6 著作 1
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