根据光谱光学相干层析(OCT)技术的原理,建立了光谱光学相干层析系统,并利用该系统测量了膜系的反射光谱。该方法通过傅里叶变换实现了光学相干层析信号光谱信息的提取,克服了传统反射测量方法测量结果不直观、受非测量面干扰等问题。测量所得的光谱反射率,与商业仪器的测量值吻合较好,均方差仅为0.0488。
A spectroscopic optical coherence tomography (OCT) system based on the principle of spectroscopic OCT was built, and the reflectance spectrum of multilayer film was measured. This method uses the Fourier transform to pick out the spectral information of OCT signals, and overcomes such limitations of existent film reflectivity measurement methods as lack of intuitionstic results and non-metrical surface interference. The gained spectral reflectivity matches well with the result calibrated by commercial instrument, and the mean square error turns out to be only 0. 0488.