中文摘要：

用脉冲直流等离子体辅助化学气相沉积（PCVD）方法在高速钢基体上沉积出Ti-Si-C-N超硬薄膜．XRD，XPS及HRTEM等测试表明，薄膜由纳米晶／非晶复合结构组成（nc-Ti（C，N）／a-Si3N4／a-C-C或nc-Ti（C，N）／h-Si3N4／a-Si3N4／a-C-C）．Ti（C1N）显示（200）晶面择优取向．高温氧化实验显示：随Ti含量降低和Si含量增大，Ti-Si-C-N薄膜的抗氧化温度逐步提高；当Ti含量为8．7％、Si含量为17．8％时，薄膜中出现少量晶化的密排六方结构的h-Si3N4，弥散分布在非晶基体中，薄膜抗氧化温度达到900℃．Ti-Si-C-N薄膜的氧化过程分为增重和失重两个阶段，进入失重阶段后薄膜很快失效．

英文摘要：

Superhard nanocomposite Ti-Si-C-N coatings were deposited on substrate of high speed steel using an industrial pulsed d.c. plasma chemical vapor deposition （PCVD） set-up. Detailed microstructure examined by means of XRD, XPS and TEM suggested that the Ti-Si-C-N coatings were the nanocomposite structure composed of nanocrystalline Ti（C, N） and amorphous carbon and Si3N4, occasionally h-Si3N4. Ti（C, N） showed a strong （200） preferred orientation. With increasing of Ti content and decreasing of Si content, high-temperature oxidation resistance was improved gradually. When Ti and Si contents were 8.7% and 17.8%, respectively, the coating exhibited the better high temperature （900 ℃） oxidation resistance, which is related to the increase of amorphous Si3N4 and h-Si3N4 appeared dispersively in the amorphous matrix, both can act as an efficient barrier against oxygen diffusion. Two-stage oxidation process involving mass gain and loss were observed, the failure of the coating took place in the process of mass loss.