设计了一种椭圆偏振态的数据测量系统,给出了实验原理和相关的理论公式。最后进行了验证性的实验,分析了方位角和消光比这两个参数,证明实验系统是可靠的。由于将虚拟仪器引入了系统,使得系统得到明显简化。
The measurement setup of ellipsometry data is designed in this paper. The experiment principle and the formulas concerned are presented. The virtual instrument is used in the system. Finally, the experimental result shows that the setup is credible.