中文摘要：

采用直流反应磁控溅射技术在M2高速钢基片上制备了不同Mo含量的Cr Mo N复合涂层,研究了Mo含量的变化对Cr Mo N复合涂层成分、相结构、化学价态、截面形貌、显微硬度和摩擦性能等的影响.结果表明,随着Mo含量的增加,Cr Mo N复合涂层的相结构先转变为以fcc-Cr N相为基础的（Cr,Mo）N置换式固溶体,后转变为以fcc-g-Mo2N相为主的混合相,当Mo含量为69.3%（原子分数）时,伴有少量的bcc-Mo相生成;Cr Mo N复合涂层的显微硬度先增加后降低,在Mo含量为45.4%时具有最高值;当Mo含量大于45.4%时,在与对磨副摩擦过程中会生成大量的Mo O3相,降低了摩擦系数和磨损率.

英文摘要：

Ceramic coatings are usually used as protective coatings to improve performance and durability of tools and components now. Compared with conventional Ti N based hard coating, Cr N based coating like Cr-X-N（X=Ti, Al, Si, C, B, Ta, Nb, Ni） is a more interesting choice because of low friction coefficient, superior oxidation resistance and excellent corrosion resistance under severe environment conditions. The Cr Mo N is among these coatings and attractive since self-lubricating phase Mo O3 may be formed in tribological process. However the effect of Mo content on structure and tribological properties of Cr Mo N coatings is not still clear. In the present study,Cr Mo N composite coatings with different Mo content were deposited on M2 high speed steel（HSS） substrates by DC reactive magnetron sputtering. The effect of Mo content on the microstructure and properties was investigated systematically, including the chemical composition, phase structure, chemical valence, cross-section morphologies,microhardness and tribological properties. The results showed that the phase transformation of the as- deposited coatings occurred with the increase of Mo content. The phase structure changed to（Cr, Mo）N substitutional solid solution based on Cr N-type firstly, and then to mixed phase with g-Mo2 N as main phase, and a small amount of elemental bcc-Mo phase appeared when the Mo content is 69.3%. The microhardness of the Cr Mo N composite coat-ings always increased until the highest hardness when the Mo content reached to 45.4%, and then decreased; a relatively low friction coefficient was obtained compared with that of the Cr N coating when more than 45.4%Mo content was doped. The reason is that the more Mo O3 lubricant phase could be formed in tribological process.