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Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capac
  • ISSN号：0003-6951
  • 期刊名称：Applied Physics Letters
  • 时间：0
  • 页码：031504-1-031504-3
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Chang, Da-Lei|Xu, Yong|Li, Xiao-Song|Li, Zhi-Cheng|Zhu, Ai-Min|Xu, Xiang|Lu, Wen-Qi|Wang, You-Nian|Wang, Shuai|Bi, Zhen-Hua|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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