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Microscopic morphology evolution during ion beam smoothing of Zerodur surfaces
  • ISSN号：1094-4087
  • 期刊名称：Optics Express
  • 时间：2014.1.2
  • 页码：377-386
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： 廖文林|戴一帆|解旭辉|周林|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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