中文摘要：

近年来航空航天、国防、微电子、现代医学和生物工程等行业对精密/超精密三维微小零件的需求日益迫切。微细切削加工技术由于不仅可以实现多种材料复杂形状三维微小零件的加工,而且工艺设备体积小、能耗低,所以越来越受到世界各国的广泛关注。微主轴作为微机床的核心功能部件,直接决定了微机床的性能及微细切削加工技术的发展和应用。因此有必要对微主轴的性能要求及其研究现状进行系统分析和深入总结。系统分析微细切削加工用微主轴在切削力、转矩、回转速度、回转精度等性能方面的具体要求;全面评述微主轴在结构设计、高速动力源、高速精密支承轴承、刀具夹持、控制补偿等几个关键技术方面的研究现状;对比研究现状与性能要求,详细指出现有微主轴存在着转速达不到要求、高转速下刀具的跳动大、负载特性差等几个主要问题,并针对性地提出比较可行的改进措施;同时对微主轴的发展趋势进行预测和展望。

英文摘要：

Precision and ultra-precision 3D miniature components are increasingly in demand in the sector of aerospace,defense,micro-electronics,modem medicine and biological engineering industries in recent years.Micro-cutting technology draws more and more attention all around the world not only because of its ability to manufacture geometrically complex 3D miniature components in a wide range of engineering materials but also small equipments and low energy consumption.As key components of micro-machine tools,micro-spindles directly determine the performance of micro-machine tools and the development and application of micro-cutting technology.Therefore,it is necessary to review the performance requirements and research state of micro-spindles systematically and intensively.The performance requirements of micro-spindles for micro-cutting on cutting force,torque,rotating speed and rotary accuracy are systematically analyzed.The research state of micro spindles in respects of their structures,high-speed power sources,high-speed and precision bearings,tool holders,control and compensation is comprehensively elaborated.Some main problems existing in micro-spindles,such as rotating speed less than the requirement,large error motion of the tool and low chip load capacity at high rotating speed are pointed out in detail by comparing the present achievements with the performance requirements,and the feasible countermeasures presented.And the future development tendency of micro spindles is predicted and prospected.