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In situ aberration measurement technique based on an aerial image with an optimized source
  • ISSN号：0091-3286
  • 期刊名称：Optical Engineering
  • 时间：2013
  • 页码：063602-
  • 相关项目：超大数值孔径光刻成像与图形保真技术研究
作者： Yan, Guanyong|Wang, Xiangzhao|Li, Sikun|Yang, Jishuo|Xu, Dongbo|Duan, Lifeng|Bourov, Anatoly Y.|Erdmann, Andreas|
同期刊论文项目
超大数值孔径光刻成像与图形保真技术研究
期刊论文 70 会议论文 20 专利 75
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