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Contact stress non-uniformity of wafer surface for multi-zone chemical mechanical polishing process
  • ISSN号：1674-7321
  • 期刊名称：Science in China - Series E: Technological Science
  • 时间：2013
  • 页码：1974-1979
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Wang, Tongqing|Lu, Xinchun|Zhao, Dewen|He, Yongyong|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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