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Ion Beam Figuring System for Ultra-precise Optics
  • ISSN号：1013-9826
  • 期刊名称：Key Engineering Materials
  • 时间：2012.5.1
  • 页码：19-24
  • 相关项目：光刻物镜光学零件纳米精度制造基础研究
作者： Yuan Zheng|Dai Yifan|Xie Xuhui|
同期刊论文项目
光刻物镜光学零件纳米精度制造基础研究
期刊论文 46 会议论文 7 获奖 4 著作 1
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