中文摘要：

硅基材料由于具有高理论比容量、低嵌锂电位而有望替代锂离子电池石墨类负极材料，但是首次不可逆容量大、循环寿命差是阻止其商业化的主要问题。薄膜化是提高硅基材料循环寿命的一种有效手段。本文讨论了硅基薄膜在脱嵌锂过程中的结构变化及容量衰减原因，综述了磁控溅射法制备硅基薄膜的研究进展，并对硅基薄膜用于锂离子电池负极材料的研究前景进行展望。

英文摘要：

Si -based materials are promising alternative anode materials to graphitic carbons for lithium ion batteries （LIBs） due to their high theoretical specific capacity and low potential for lithium insertion. However, the commercialization of Si -based materials has been hindered by the large initial irreversible capacity and poor cycle life. Preparing Si - based thin film materials is an effective way to improve the cycling performance. This article has discussed the change of the crystal structure and surface morphology of the Si thin - film anode during Li insertion and extraction as well as capacity fading. And it summari- zes the research progress of Si - based thin films prepared by magnetron sputtering as anode materials for LIBs. Additionally, the future research and development of the Si - based thin films is also presented.