中文摘要：

表面增强拉曼光谱（surface-enhanced Raman spectroscopy,SERS）技术是一种基于探测吸附于金属基底表面分子振动光谱的快速无损检测方法,目前广泛应用于表面吸附、电化学催化、传感器、生物医学检测和痕量的检测与分析等领域。本实验采用直流磁控溅射技术在BK7玻璃基底上沉积一层厚度为50nm的金属铜薄膜,在Ar离子轰击作用下获得不同表面粗糙度的金属铜薄膜样品,从而制备具有不同表面增强拉曼光谱活性的金属基底。实验样品分别通过X射线衍射仪（XRD）、原子力显微镜（AFM）、分光光度计、拉曼光谱仪表征其结构、表面形貌及光学性质。测试结果表明铜膜在Ar离子束轰击前后,样品X射线衍射谱的峰值强度没有发生变化,说明其晶相结构未发生改变;随着离子束能量的增加,薄膜表面粗糙度改变,光学散射强度随着表面粗糙度的增加而增强;离子束薄膜表面改性后,以罗丹明B（Rh B）为探针分子,表征薄膜样品表面增强拉曼的活性,通过对比不同样品表面Rh B的拉曼光谱,发现其光谱强度随金属铜薄膜样品表面粗糙度的增加而增强。

英文摘要：

Surface-enhanced Raman Spectroscopy（SERS）was a rapid non-destructive testing.It was based on detecting molecule vibrational spectrum which was adsorbed on the metallic surface.Now it was widely used in surface adsorption,electrochemical catalysis,sensors,bio-medical testing,trace amount analysis and other fields.In our experiment,copper metallic films were deposited 50 nm on BK7 glass substrates by direct current magnetron sputtering.And then the films were employed for the Ar ion beam etching modification.The structure,morphology and optical properties was characterized by X-ray diffraction（XRD）,Atomic Force Microscope（AFM）,spectrophotometer and Raman spectroscopy.In the XRD graph,the peak value of modify copper film were the same with the untreated film.So the structure of copper film was not change.With increasing the power of Ar ion,the surface roughness was changed,and scattered spectrum intensity was increased by surface roughness added.With Rhodamine B（Rh B）as a probe molecule,Raman scattered spectrum was detected on modify copper film.Compared with the different samples,we can find the Raman signal was enhanced by surface roughness added.It will have some value on study the principles of SERS.