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Effects of bias voltage on structure and properties of TiAl-doped a-C:H films prepared by magnetron
  • ISSN号：0142-2421
  • 期刊名称：Surface and Interface Analysis
  • 时间：0
  • 页码：677-682
  • 相关项目：复合结构碳基薄膜的制备及其摩擦学特性研究
作者： Xianjue Pang|Lei Shi|Peng Wang|Guangan Zhang|Weimin Liu|
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复合结构碳基薄膜的制备及其摩擦学特性研究
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