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中文摘要：
进行了XeCl激光器工作参数优化实验，通过建立和分析XeCl激光器混合气体的动力学方程及模型，模拟计算了不同工作参数条件下，激光输出的瞬态过程，研究讨论了混合气体的配比和压强对准分子激光器的工作特性的影响，模拟分析了激光器最佳的运行参数。根据模拟结果对XeCl激光器的工作参数进行了优化调整实验，气体浓度配比设置为Ne／Xe／HCl=875／15／1，气体总压强设置为3．6×10^5Pa，获得了单脉冲能量为180mJ，脉冲宽度为30ns的308nm激光输出，脉冲重复频率为20Hz，脉冲能量不稳定度小于5％。
英文摘要：
The operating parameters of the XeCl laser was optimized by a series of experiments. The dynamic equations and model of the mixture gas of the XeCl laser in the laser tube were established and analyzed. And then, the numerical simulations of transient state of laser output were carried out under different operating parameters conditions. Furthermore, the influence of the ratio of the hybrid gas constituents and the pressure on the characteristics of laser output was analyzed and discussed. According to the simulation results, the improved experiments were performed in order to get the optimal operating parameters of the XeCl excimer laser. Experimental results show that the optimal laser beam output is obtained when the ratio of gases concentration of Ne, Xe, and HCL is 875：15：1 and the total pressure is 3.6×10^5 Pa. The laser beam has a single pulse energy of 180 mJ, a pulse width of 30 ns at the wavelength of 308 nm, and its pulse repetition frequency is 20 Hz, the instability of the pulse energy is less than 5%.
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