中文摘要：

为促进大气压Ar／H2O等离子体射流放电在材料表面改性、等离子体医学及环境工程等方面的应用，研究了大气压Ar／H2O等离子体射流放电模式和放电参量。测量了这种射流在不同外加电压下的电气特性、发光特性及光谱特性，并据此计算得到主要放电参量，如放电功率、传输电荷、电子激发温度、分子振动温度以及转动温度等随外加电压的变化规律。结果表明：随着外加电压的增大，大气压Ar／H2O等离子体射流放电模式可分为电晕放电、介质阻挡放电和射流放电3个阶段，并可通过电压电流波形图和发光图像进行区分。Ar／H2O等离子体射流产生的粒子主要有Ar、OH以及少量的O和N2等。随着外加电压的增大，放电功率、传输电荷及主要粒子（包括OH）的谱线强度都随着外加电压的增大而增大。当外加电压从7kV增加到9．5kV时，分子振动温度和转动温度随着外加电压的增大而增大，其变化范围分别为1000－2200K和350-550K。当外加电压为9．5kV时，电子激发温度为0．646eV。

英文摘要：

To promote the applications of atmospheric pressure plasma jet（APPJ） in Ar/H2O mixtures in material surface modification, plasma medicine, and environmental engineering, etc., we investigated the discharge modes and some parameters of the APPJ in Ar/H2O. We measured the electrical, light-emission and spectral characteristics of this APPJ induced by different applied voltages, and hence calculated the pattern of some main discharge parameters such as discharge power, transported charge, electron excitation temperature, molecule vibrational temperature, and rotational temperature varying with applied voltage. The results show that, with increasing applied voltage, the discharge process of APPJ in Ar/H2O can be divided into three phases, namely, corona discharge, dielectric barrier discharge（DBD）, and jet discharge, which can be distinguished easily by voltage-current waveforms and light-emission images. The main species produced by APPJ in Ar/H2O includes Ar and OH, as well as a small amount of O and N2. With increasing applied voltage, the discharge power, transported charges, and spectrum intensity of the main species （including OH） all increase. In addition, when the applied voltage rises from7 kV to 9.5 kV, the electron excitation temperature and rotational temperature also increase from 1 000 K to 2 200 K and from 350 K to 550 K, respectively, and the excitation temperature of electron is 0.646 eV under the applied voltage of 9.5 kV.