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Intrinsic gettering based on rapid thermal annealing in germanium- doped Czochralski silicon
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  • 相关项目：微锗掺杂直拉硅单晶氧和微缺陷的研究
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微锗掺杂直拉硅单晶氧和微缺陷的研究
期刊论文 15 会议论文 3 著作 2
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