中文摘要：

该文针对现有压电马达应用于扫描探针显微镜时,难以在恶劣条件下获得高品质原子分辨率图像的问题,介绍了文章作者近年研制的新型小尺寸大推力压电马达,其中包括：壁虎马达、熊猫马达、金枪鱼马达和蜘蛛马达以及它们的一些压电片叠堆型设计,给出了它们的结构图、实物照片和工作原理。文章还讨论了如何利用它们制成高质量的扫描隧道显微镜（STM）和磁力显微镜（MFM）,并特别展示了用这种STM在无隔音、无减震条件下,甚至在强振动干扰的恶劣条件下测得的高清晰原子分辨率图像。虽然这些高品质原子分辨率成像主要是由壁虎马达制成的STM给出的,但金枪鱼马达具有更强的输出推力,具有在更恶劣条件下的应用潜力。蜘蛛马达是一种惯性马达,但能够比传统惯性马达输出更强的推力,所以也具有在恶劣条件下应用的潜力。

英文摘要：

It is difficult to obtain high quality atomic resolution images under harsh con- ditions when using current piezoelectric motors to build a scanning probe microscope. This arti- cle introduces several new types of compact piezoelectric motors with high output force that we developed recently, including GeckoDrive, PandaDrive, TunaDrive, SpiderDrive, and their varia- tions, implemented using piezo plate stacks. Their structures, photographs, operation principles. and bow they are adopted to build high quality scanning tunneling and magnetic force microscopes are presented. Of particular note are the high clarity, atomically resolved, scanning tunneling microscope （STM） images obtained without using any sound or vibration isolation, even in the extremely strong vibration environment inside a water-cooled magnet. Although these STM images were mainly taken using GeckoDrive, the TunaDrive can actually output bigger force, thus showing better promise in harsh condition applications. The SpidcrDrive is a type of incrlial piezoelectric motor, but it can output stronger force than traditional inertial motors so it also has good potential for imaging under harsh conditions.