分析研究了石英晶体微天平(QCM)传感器的工作原理。针对其敏感元件的晶片可能会受到不同因素的影响而导致输出稳定性下降的特点,介绍了利用D触发器产生差频提取频率信号的方法。降低了因环境因素对传感器造成的影响、抑制了频率漂移,提高了微天平的稳定性,使传感器的性能得到明显提高。
The operating principle of QCM sensor has been analyzed in this paper. Since the wafer of the sensing element can be affected by different factors to cause the output stability to decline,a method utilizing D trigger to produce the differential frequency to acquire the frequency signal is proposed. Using this method,the effect of the environmental factor on the sensor can be reduced,the frequency drift is suppressed and the stability of the micro-balance is improved,so that the performance of the sensor has been markedly improved.