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中文摘要：
采用多靶磁控溅射仪在室温和衬底温度为300℃的条件下制备Tb/Fe/Dy纳米多层膜,研究其磁性能和超磁致伸缩性能.结果表明该纳米多层膜较TbDyFe单层膜有更明显的垂直磁各向异性和更大的矫顽力.尽管纳米多层膜样品具有垂直各向异性,但仍具有超磁致伸缩性能.特别是衬底温度为300℃的纳米多层膜样品。具有Laves相结构的TbDyFe纳米晶体析出,使得低磁场下磁致伸缩性能有了显著的提高.
英文摘要：
Tb/Fe/Dy nano-multilayer films were deposited by multi-targets magnetron sputte- ring system at room temperature and substrate temperature of 300℃. The nano-multilayer films have large perpendicular anisotropy and high coercive force than the TbDyFe single layer film, and show giant magnetostrictive effect though they have perpendicular anisotropy. The nano- multilayer film deposited by substrate temperature of 300℃ has enhanced low field giant magnetostrictive effect because the nano-crystaltine of TbDyFe with Laves phase structure segregates from the amorphous matrix.
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