中文摘要：

为优化触发真空开关（triggered vacuum switch, TVS）性能，满足脉冲功率技术对开关器件的要求，设计了一种多棒级型激光触发真空开关（multi-electrode laser-triggered vacuum switch, LTVS）。文中详细讨论了外施电压、激光触发能量、开关极性、焦斑能量密度等对开关延迟时间、抖动、时间和最低工作电压等触发特性的影响，提出开关导通是热机制和碰撞电离机制相互作用的假设，并为此类开关的优化设计提供理论依据和参考。实验表明：开关的延迟时间最低可达17ns，抖动最低可达10ns，最低工作电压为60V；开关导通需满足一定的激光触发能量和外施电压要求，在触发能量一定的情况下，焦斑能量密度是影响开关触发特性主要因素；开关极性是影响触发稳定性的主要因素。

英文摘要：

An multi-electrode laser-triggered vacuum switch（LTVS） was developed to optimize the triggered vacuum switch（TVS） for the requirements of pulse power teehnologies. The relationship among applied voltages, laser energies, polarity, average energies of the spot and the trigger characteristics which mainly contain the delay time, jitter time and minimum operating voltage were analyzed in detail. The interaction between a thermal mechanism and an ion collision mechanism was proposed to explain the switch conduction, which could provide the theory basis of the design of the TVS. It is concluded that the minimum delay time and jitter time can reach 17 ns and ±10 ns respectively. The minimum operating voltage of 60V is observed. Furthermore, the laser energy and the applied voltage are needed to trigger the switch. Finally, the delay time is mainly decided by the average energy of the spot in the case of certain triggering energy and the polarity effect is one of the main factors affecting trigger stability.