空间调制傅里叶变换红外光谱仪无可动部件,系统稳定而紧凑,而且程差可控,可实现在线监测和实时检测。多级微反射镜是光谱仪干涉系统的关键器件,其在系统中的位置精度对光谱仪性能影响很大。本文对多级微反射镜的倾斜误差引起的光程差变化进行了理论计算,并利用光学软件进行了模拟仿真。分析结果表明,随着多级微反射镜倾斜角度的增大,干涉图对比度下降,对应的光谱图脉冲谱线展宽,信噪比下降,严重时会出现波数偏离。以上分析方法对后期系统公差分配及装调有着重要的指导意义。
The system of space-modulated Fourier transform infrared spectrometer without moving parts is stable and compact, moreover, it can realize the on-line monitoring and real-time detection. The position accuracy of muhi-mieromirrors as the key components has a great influence on spectrometric performance. In the present paper, the muhi-mcromirrors tilt error caused by optical path difference changes was calculated and simulated. The analysis shows that, as the multi-micromirrors tilt angle in- creased, the interference pattern contrast decreased and the signal to noise ratio reduced. The results could be used in the toler- ance distribution and the systemic alignment in the next step.