采用热化学气相沉积的方法在选择性液相外延方法制备的GaAs微尖上生长碳纳米管。利用扫描电子显微镜以及拉曼光谱对生长的碳纳米管进行表征。结果表明:GaAs微尖在高温下重新结晶成条状梯形GaAs阵列,生长的碳纳米管连接在相邻的GaAs阵列之间,形态规整,具有较好的石墨微晶结构。在此基础上,提出在微尖上生长纳米管的模型,为实现微纳器件互联提供了一种新方法。
Carbon nanotubes(CNTs) fabricated by thermal chemical vapor deposition(T-CVD) on GaAs microtips were investigate.Scanning electron microscope and Raman spectrum were used to characterize the properties of the nanotubes.The results showed that the GaAs tips changed into ladder-like array at high temperature and carbon nanotubes connected the neighbor GaAs with high graphite microcrystal structure.A model for the CNTs grown on GaAs microtips was also proposed.The results presented here make a significant step to the connection for micro or nano devices.