利用射频溅射技术在一个单模玻璃光波导的局部表面淀积一层两端呈梯度的高折射率透明氧化物薄膜,形成低损失、高灵敏度平面复合光波导芯片。这种结构能够使得玻璃光波导内沿同一路径传播的横电基模(TE0)与横磁基模(TM0)在梯度薄膜区间产生纵向空间分离,导致TE0模的消逝场相比TM0模显著增强。利用复合光波导芯片,结合棱镜一样品池组合体和集成式选偏光探测器研制出基于偏振干涉测量的OWG01型生化检测仪。对液体折射率响应的测试结果表明复合光波导芯片的热光效应非常小,而仪器的测量误差主要来自待测液体自身的折射率随温度的变化。
A composite optical waveguide (COWG) based on polarimetric interferometer was developed. The COWG is a single-mode glass waveguide which overlaid with a tapered high-index layer such as TiO2 and Ta2 05. It can cause the spatial separation in the film-covered region of the zero-order transverse electric (TE0) and magnetic (TM0) modes that transmit along the same path in the glass waveguide, making the evanescent field with the TE0 mode much stronger than that with the TMo mode. By using the COWG polarimetric interferometer combined with a novel prism-chamber assembly and a polarization-controllable photodetector, the model OWG-01 biochemical analyzer was developed, which is highly sensitive, reliable and convenient. Test results indicate that the response of the analyzer to refractive index of liquid reveal has a very weak thermo-optical effect on the COWG chip, and the main measurement error comes from the temperature variation of refractive index of the liquid sample.