中文摘要：

采用中频磁控溅射技术在单晶硅表面制备含铝类金刚石（Al-DLC）薄膜，利用原子力显微镜、X射线光电子能谱仪、红外光谱仪、纳米压痕仪和微摩擦磨损试验机等考察薄膜表面形貌、结构及其摩擦磨损性能．结果表明：所制备的Al-DLC薄膜均匀、致密，表面粗糙度小，应力较低，硬度较高；薄膜与Si3N4陶瓷球对摩时显示出良好抗磨减摩性能；加基底偏压所制备薄膜的摩擦系数明显降低，耐磨寿命显著提高．

英文摘要：

Al containing diamond-like carbon （Al-DLC） thin films were deposited on Si substrate by medium frequency magnetron sputtering. The microstructure, morphology and mechanical properties of the Al-DLC films were investigated by means of X-ray photoelectron spectroscopy, infrared spectrometry, atomic force microscopy and nano-indentation test. The tribological property of the Al-DLC films was studied on a micro ball on disk tester. The friction and wear behavior of the Al-DLC films sliding against Si3 N4 ceramic ball was evaluated on a ball-on-disk tribometer. The morphologies of the wear scar of the films were observed on a scanning electron microscope. The film had typical diamond-like characteristics and the film surface was very smooth and compact. The hardness of the films was relatively high while the stress was low. It exhibited good friction-reducing and anti-wear behavior as slid- ing against a Si3N4 ball. The films prepared at - 1 600 V pulse bias exhibited even lower fiction coefficient and much longer wear life compared to the films prepared at - 1 600 V nulse bias.