中文摘要：

采用化学气相沉积的方法,以锌粉、硝酸铜为原料,在硅衬底上制备了铜锌合金微米杆。用X射线衍射（XRD）、扫描电子显微镜（SEM）和X射线能谱（EDS）对沉积产物的结构、形貌和成分进行了测试与表征。结果表明,生长的铜锌合金微米杆为金属间化合物Cu3Zn合金,为立方相结构,直径在0.1~5μm之间,长度可达3~30μm。锌在铜锌合金微米杆的生长中起着至关重要的作用。铜锌合金微米杆的生长属于气固反应诱导下的气液固（VLS）生长机制,与经典的气液固（VLS）生长机制具有明显不同的特点。

英文摘要：

The Cu-Zn alloy micron rods were prepared by chemical vapor deposition（CVD） method on silicon substrate using Zn powder and Cu（NO3）2·3H2O as starting materials.The microstructures,morphologies of as-prepared micron rods were characterized by X-ray diffractometry（XRD）,scanning electron microscopy（SEM） and X-ray energy dispersive spectroscopy（EDS）.The results show that asprepared micron rods are Cu3Zn alloy with cubic structure,and the atomic ratio of Cu∶ Zn = 3∶ 1.The micron rods have the size 0.1-5 μm in width and 3-30 μm in length.Zinc plays a key role in the growth of Cu3Zn alloy micro rods.The growth of Cu3Zn alloy micron rods is governed by the vapor-liquid-solid（VLS） growth mechanism induced by vapor-solid reaction,which is different from the traditional VLS model.