中文摘要：

提出了一种利用通孔式模具制作PMMA（聚甲基丙烯酸甲酯）聚合物微透镜阵列的非接触式热压印工艺。该方法采用不锈钢圆孔阵列模板对热塑性聚合物材料进行压印,利用流动态下聚合物材料的表面张力形成透镜,透镜的曲率和高度可通过调节温度、压力和持续时间来控制。利用有限元软件对压印过程进行了分析,并用自制的热压印设备进行了非接触式模压制作实验,讨论了压印的温度和压力等工艺参数,并对形成的微透镜阵列进行了光学检测。结果表明：该方法可用于热塑性聚合物光学微透镜的制作,一次成型,形成的透镜表面形貌好、位置精度高。

英文摘要：

This paper presents a novel method for fabrication of polymethyl methacrylate（PMMA） microlens array by contactless hot-embossing with through-holes stainless molds.An array of plano convex microlenses was formed due to the surface tension of polymer above the glass transition temperature.The curvature and height was controlled by adjusting the temperature,pressure and time duration.In addition,the principle of contactless hot-embossing by finite element analysis was studied,and the model was built by Ansys.An independently developed hot-embossing equipment was used to fabricate microlens arrays on PMMA sheet.And the influences of technological parameters such as temperature and pressure were analyzed.Finally,their optical performances were tested.The experimental results show that microlens array has good surface features and high position precision.The contactless hot-embossing technology is process simplified,one-step forming,independent on surface quality of mold.