中文摘要：

采用混合靶直流磁控反应溅射法，在玻璃基体上溅射沉积了含有氧化钇的TiO2薄膜。X-射线光电子能谱分析结果表明，薄膜是由Y2O3和TiO2复合氧化物组成的。钇的存在会抑制薄膜中二氧化钛晶体的形成。薄膜的紫外可见光谱透射率略有下降，而反射率有所增加。钇的掺杂对二氧化钛薄膜的光催化活性起负作用，光催化降解甲基橙反应的活性随钇含量的增加而下降。

英文摘要：

Y2O3 doped TiO2 films were prepared on glass substrates by means of pulsed DC reactive magnetron sputtering method using Ti and Y mixed target. XPS results showed that the films were composed of Y203-TiO2 composite oxides. The existence of yttrium inhibited the crystal growth of TiO2 in the films. UV-Visible transmittance of the films decreased slightly whereas their reflectance increased gently. Yttrium doping exerts detrimental effect on photocatalytic activity of the TiO2 films. Photocatalytic activity for degradation of methyl orange fo the film is declined with increasing yttrium concentration.