位置：成果数据库 > 期刊 > 期刊详情页
A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical
  • 期刊名称：The International Journal of Advanced Manufacturin
  • 时间：2013
  • 页码：1009-1016
  • 相关项目：铜互连层表面的约束刻蚀化学平坦化新方法
作者： Zhou, Ping|Guo, Dongming|Kang, Renke|Jin, Zhuji|
同期刊论文项目
铜互连层表面的约束刻蚀化学平坦化新方法
期刊论文 18 会议论文 7
同项目期刊论文
Factors Influencing Hydroxyl Radical Formation in a Photo-Induced Confined Etching System
New Strategy for Electrochemical Micropatterning of Nafion Film in Sulfuric Acid Solution
<a name="OLE_LINK5"></a><a name="OLE_LINK2"></a><a na
Electrogenerated chemical polishing of copper
Numerical studies on scavenging reaction in confined etchant layer technique (CELT)
A novel planarization method based on photoinduced confined chemical etching.
A leveling method based on current feedback mode of scanning electrochemical microscopy.
Electrochemical mechanical micromachining based on confined etchant layer technique.
光诱导约束刻蚀体系中羟基自由基生成的影响因素
由苯胺二聚体电化学制备聚苯胺的形貌可控性初探
电化学微/纳米加工技术
工件旋转法磨削硅片的亚表面损伤分布