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The effect of applied substrate negative bias voltage on the structure and properties of Al-containi
  • ISSN号：0257-8972
  • 期刊名称：Surface & Coatings Technology
  • 时间：0
  • 页码：2684-2689
  • 语言：英文
  • 相关项目：低气氛敏感性类金刚石碳膜的制备及其性能研究
作者： 薛群基|
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低气氛敏感性类金刚石碳膜的制备及其性能研究
期刊论文 17 专利 2
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