中文摘要：

采用电磁场理论建立了FeNi磁芯螺线管微电感的物理模型，并对交流载荷下的微电感进行了模拟．通过与磁芯厚度为10、20、30和40μm的微电感的实验结果对比，表明该物理模型能够较准确地模拟磁芯螺线管微电感的主要损耗，进而可计算微电感的电感量和品质因子．模拟结果与实验符合较好．

英文摘要：

This paper presented a physical model of a solenoid micro-inductor with magnetic core on the basis of electromagnetic theory. In this model, the properties of micro-inductor at MHz are simulated, and compared with the experimental results for a solenoid micro-inductor with a core thickness in 10, 20, 30 and 40μm, respectively. The results show that the model can simulate the major power loss of microinductor, which can be used to calculate the inductance and quality factor of micro-inductor. The calculated results agree with the experimental data well.