中文摘要：

利用简单MEMS技术制作了高品质因数的射频可调微机械电容.此电容由静电驱动,利用WYKO NT1100光学表面轮廓仪测量在不同外加直流电压下可变电容的表面轮廓和位移等信息.测试结果表明,电容的吸合电压为13.5V,电容可调比为1.31：1,在1GHz下品质因数为51.6,电容值为0.79pF.

英文摘要：

A radio frequency （RF） tunable micromechanical capacitor with a high quality factor driven by the electrostatic force was fabricated using simple MEMS technology. The surface profile and the displacement of the variable capacitor at different values of applied voltage are measured by using a WYKO NTll00 optical surface profiler. The measured results show that the pull-in voltage is 13.5V,the tuning ratio of the capacitor is 13. 1 ： 1 ,and the quality factor and the capacitance are 51.6 and 0.79pF at 1GHz,respectively.