以三苯基膦作催化剂,苯酐(PA)与丙烯酸羟乙酯(HEA)反应,合成了碱溶性光敏预聚物(PA-HEA)。通过对反应体系酸值的测定,研究了反应时间、配比、催化剂用量及投料方式对预聚物转化率的影响;通过将光引发剂加入预聚物,经紫外光固化后,考察了固化膜的耐酸性、碱液剥膜、热稳定性等性能。结果表明,在反应时间为3h,HEA与PA配比1∶0.75,催化剂含量1%(质量分数)时,转化率较高;固化膜能在10%盐酸中耐酸30min以上,且在1%NaOH溶液中2min内可完全脱膜,在32.6~137℃有较好的热稳定性。
An alkali-soluble photosensitive prepolymer was synthesized as photoresist by one-step process. hydroxyethyl acrylate was reacted with phthalic anhydride at different molar ratios, the influences of synthetic process, such as the reaction time, the concentration of catalyst and feeding method were discussed in details. By using a suitable photoinitiator, this resin was polymerized in the exposure of UV light, a series properties of cured film were investigated. For example, it can stand 10% hydrochloric acid for over 30min and be striped in 1% NaOH within 2rain.