中文摘要：

为了提高石英玻璃的磨削去除效率与加工质量，本文基于石英玻璃化学机械磨削原理，开发了石英玻璃高效精密专用水基磨削液。此专用磨削液在水基冷却液基础上分别添加了具有化学改性、冷却、润滑和防锈性能的添加剂，通过正交实验法分析了不同添加剂对石英玻璃表面粗糙度的影响，在此基础上确定了各添加剂的最优成分配比组合。利用开发的专用磨削液与市售磨削液分别对石英玻璃进行磨削实验，实验结果表明，开发的专用磨削液可提高石英玻璃材料的表面加工质量，其磨削性能要优于市售磨削液，能实现石英玻璃高效精密化学磨削。

英文摘要：

In order to improve the efficiency and quality of quartz glass grinding, a kind of special water- based grinding fluid was developed. The development was based on the principle of chemical mechanical grinding so that the fluid possessed the virtue of chemical modification, cooling, lubricating and antirust. （）rthogonal test was utilized to analyze the effect of different additives on the surface roughness of quartz glass. Then the optimal ration combination of various additives in the special grinding fluid was determined. The developed special grinding fluid was also compared to the commercially available grinding fluid in the grinding experiment. Grinding results showed that the developed special grinding fluid can improve the surface roughness of quartz glass. It did have better grinding performance than commercially available grinding fluid, which makes it able to realize the high-precision grinding of quartz glass.