中文摘要：

基于Lalanne经验法与Gtz法向矢量法的傅里叶因式分解过程,给出了傅里叶模态层吸收法的一个快速收敛方案.通过求解解析边界轮廓函数的梯度矢量,简化了Gtz法向矢量法的傅里叶因式分解过程,使其单波长点计算时间降低两个量级.通过距离反比权重法构造4个典型方向的法向矢量场,降低了法向矢量法在傅里叶因式分解过程中的不确定性.根据这4个典型法向矢量场与Lalanne经验法,提供了5个傅里叶模态层吸收法的收敛性改进矩阵.预先对5个收敛性改进矩阵优选分析,选择一个最优矩阵进行傅里叶模态层吸收法的衍射模拟计算,可以实现快速收敛.计算结果表明,对于硅材料简单结构,优选的改进矩阵相比于非优选矩阵收敛性提高2阶左右,能有效提高衍射场计算速度.该方案可提高光栅设计和集成电路结构分析/测试的效率.

英文摘要：

Based on the Fourier factorization process in Lalanne′s empirical method and Gtz normal vector method,a fast convergence solution was proposed for Fourier modal slice absorption method.The gradient vectors of analytic boundary function were used to simplify the Fourier factorization process in Gtz normal vector method,which made the caclation time for a single wavelength point reduced by 2orders of magnitude.4typical types of normal vector fields were built by inverse distance weighting algorithm,and the degrees of freedom in normal vector method was reduced.According to these 4normal vector fields and the Lalanne′s method,5types of convergence improved matrice were finally presented.By pre-selection among the 5matrice,an optimal matix could be implemented in the caculation of Fourier modal slice absorption method to guarantee fast convergence.Calculation results demonstate that for a simple silicone structure the optimal matrix has 2diffraction oders improved compared with the unpreferred slected matrix,and effectively improves the simulation rate of diffraction.The proposed fast convergence solution is expected to improve the efficiency for grating design and analysis/testing of integrated circuit.