中文摘要：

为提高MEMS硅基底表面的抗摩擦磨损性能,采用电泳沉积法在硅基底表面制备石墨烯薄膜,利用旋转摩擦试验机测试不同条件下制备的石墨烯薄膜的摩擦性能,并用3D轮廓仪考察相应的磨损体积.结果表明：当石墨烯溶液质量浓度为0.3mg/mL,沉积电压为20V时,摩擦系数最低达到0.079,同时磨损体积降低2个数量级.采用电泳沉积法制备石墨烯薄膜具有巨大的发展前景.

英文摘要：

In order to improve friction and wear performance of the surface of the silicon-based devices in MEMS, graphene film was deposited on silicon substrate with electrophoretic deposition method and its tribological behavior was tested on a rotary friction tester on different experiment condition. And the wear volume of the device was investigated with 3-D contourgraph. The result indicated that the lowest friction coefficient of the graphene film would reduce to 0. 079 and the wear volume would reduce by two orders of magnitude when the mass-concentration of the graphene solution was 0. 3 mg/mL and deposition voltage was 20 V. Application of electrophoretic deposition for preparation of graphene file would have a great de- veloping prospect potential on MEMS devices using electrophoretic deposition method.