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The Etching Reaction and Surface Reconstruction of Bismuth ZincNiobate Thin Film in SF6/Ar Plasma,
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：2013.9.9
  • 页码：28-32
  • 相关项目：铁电薄膜微图形化及其电性能相关性研究
作者： 戴丽萍|
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